Semiconductors Brooks instrument GP200, SLA7840, PC100, VDM300, etc.
Precise and reproducible process control: this is the main driving factor in the production of electronics and semiconductor products. As each successive generation of tools, processes and assemblies has been developed and deployed, the extreme, ultra–high performance requirements and the need for continuous innovation and improvement in semiconductor flow and pressure measurement devices have not stopped – and continue to be - non-stop.
Brooks Instrument semiconductor products meet these requirements by offering the industry's most advanced solutions for measuring flow, pressure, vacuum and steam supply. Our portfolio of semiconductor products is based on our many years of experience in creating many revolutionary measurement and control devices, which are now standard components of technological tools at all levels of the industry.
Controllers and meters of high and ultra-high purity gas mass flow
Series: GP200, GF100 EtherCAT, GF100, 9861.
Pressure and vacuum measuring devices
Series: 122 (pressure gauges), 122 (relays and pressure sensors), SolidSense II, SLA7840, PC100, CMC, XacTorr.
Liquid and steam products
Series: VDM300, Petra-Count IMS.
- GP200. Технические характеристики (eng).
- GF100 EtherCAT. Технические характеристики (eng).
- GP100. Технические характеристики (eng).
- 9861. Технические характеристики (eng).
- 122 (манометры). Технические характеристики (eng).
- 122 (реле и датчики давления). Технические характеристики (eng).
- SolidSense II. Технические характеристики (eng).
- SLA7840. Технические характеристики (eng).
- PC100. Технические характеристики (eng).
- CMC. Технические характеристики (eng).
- XacTorr. Технические характеристики (eng).
- VDM300. Технические характеристики (eng).
All Brooks instrument products
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Mass flow controllers and metersSLA, GF40, GP200, 9861, Quantim, etc. -
Flowmeters with variable cross-section (rotameters)2500 Custom, Sho-Rate, MT3809C, etc. -
Pressure and vacuum measuring products8600, SolidSense II, SLA7840, CMC, etc. -
Evaporators and dispensersVDM300, Petra-Count IMS, etc. -
SemiconductorsGP200, SLA7840, PC100, VDM300, etc. -
Liquid countersOval 9800, DN 3-30", DN 1.5-16", etc. -
Accessories and softwareLR-056, S124Z, 947N, MultiFlo, etc.
About Brooks instrument
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accuracy
The accuracy of Brooks Instrument instruments is confirmed by uninterrupted operation in the most complex production systems. -
PATENTS
Brooks Instrument has more than 150 active patents in fundamental fluid measurement and control technologies. -
INNOVATIONS
Brooks Instrument is a market leader with innovative and innovative fluid measurement and control technologies.
Information Board Brooks instrument
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Price list for products -
Product catalog Brooks instrument -
Product questionnaire Brooks instrument
NEW TECHNOLOGIES GROUP
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