Mass flow controllers and meters Brooks instrument SLA, GF40, GP200, 9861, Quantim, etc.

To truly control any process, you have to measure exactly what is happening - in the supply line, in the chamber, at each point - and then use this information in real time to keep the process precisely planned and productive.

Brooks Instrument, the world leader in the field of precise measurement and control of liquids, continues to innovate in thermal mass flow technology. Starting with heat flow sensors and mass flow measurement systems, Brooks Instrument is constantly releasing new products and improving existing systems to unlock new levels of mass heat flow measurement accuracy, speed, accuracy and repeatability.

The main reasons why Brooks Instrument mass flow sensors are most widely used worldwide include:

• The industry's best range of digital mass flow meters and other products to meet a wide variety of needs.
• MultiFlo™ technology allows a single device to change gas types and ranges without removing the device from the system and increase the actual accuracy of process gas measurement. MultiFlo™ is offered for use with thermal sensors or flow sensors.
• The full product range includes options with elastomeric and metal seals for thermal mass flow sensors and coriolis mass flow sensors.
• Ultra-high purity mass flow sensors and devices designed to meet the requirements of thin-film, semiconductor and other high-tech industries.

Thermal insulation with elastomeric seal

Series: SLA5800, GF40, 5850E, 5850i, SLAMf, 4800, 5700.

Sealed metal

Series: GP200, GF100 EtherCAT, GF100, GF80, 5850EM.

High temperature thermal

Series: 5850EMH, 9861.

Coriolis

Series: Quantim.